TOTAL SOLUTION PROVIDER FOR R&D SYSTEM

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Intelligent Measurement Series







01. 상품이미지

    • 모델 제품명 제품사양 판매단위
      TLP1006 VACUUM PROBE STATION 2” dia meter standard / up to 4” 1ea/pk
      OPTION Closed Cycle refrigerator 4.5K to 325K 1ea/pk
    •  

02. 상품정보 (옵션포함 사항)

1) General Information

▪ Up to 6 Manipulated stage cryogen free 2 inch wafer Probe Station
▪ Vibration Level : Less than 1 micron
▪ Vacuum environment : 10-5 ~ 10-6 mbar
▪ Temperature Range : 4.5K to 325K
▪ Temperature Stability : ± 50mK
▪ Cooling time : 4~5 hours
▪ Warming up time : 90min with quick warming up
▪ Sample mount 2" diameter standard / up to 4" (optional)
▪ DC/RF Probe : DC to 40GHz following tips available

2) System Specification

▪ Closed Cycle refrigerator : 4.5K to 325K

- Sample stage temperature sensor
- CCR stage temperature sensor
- Sample stage heater
- CCR stage heater

▪ Cooled radiation shield and cooled IR absorbing window

- Radiation shield temperature sensor
- Radiation shield heater
- Removable top lid with viewport
- Typical temperature : 30K to 35K throughout the full-scale temp.range

▪ Electroless nickel-plated Al vacuum chamber

- Viewport : 2" window
- Probe ports up to 6 probe
- Pumping port : NW40
- Gauge port : NW25

▪ Machined base Plate (table) : 600 x 600 (mm)
▪ Support stand : low vibration and damping
▪ Temperature sensor feedthrough
▪ Optics including illumination
▪ XYZ precision micro manipulated stage
▪ DC/RF Probe
▪ Compact Turbo Pump (50L/sec, Leybold)
▪ Full range Gauge
▪ Pumping Line Vibration Isolator

03. 자료실

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