TOTAL SOLUTION PROVIDER FOR R&D SYSTEM

TERALEADER

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Lab Series








01. 상품이미지

    • 모델 제품명 제품사양 판매단위
      TLP1102 Contact Aligner 25W UV LED Array 1ea/pk
      OPTION 진공 펌프 세트 진공펌프+게이지 1ea/pk
    •  

02. 상품정보

CONFIGURATION PERFORMANCE
Alignment scope Objectives separation : 5 ~ 15mm
Total magnification : 40X, 100X, 400X
X, Y Movement range of stage : 40mm x 40mm
Adjustment : ±5°
Sample stage : X,Y,Z (±6.5mm) θ (360°) vacuum chuck
Utility Power : AC 220V 60Hz 15A
Vacuum source : Below 21.3 Kpa (-80 Kpa from atmospheric pressure)
Exposure unit Lens : Diffuse type lens
UV lamp : 25W UV LED Array
Effective exposure area : Max 100 x 100mm
Intensity distribution : ±5% or less
Intensity of illumination : 20 mW/cm2 (405 nm)
Exposure time control : Manual
LED power adjuable
Oil-liss pump

03. 자료실

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