TOTAL SOLUTION PROVIDER FOR R&D SYSTEM

TERALEADER

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01. COMPANY

02. PROCESS

03. SERIES

- Smart Deposition Series
  1) PVD (Physical Vapor Deposition)
      1-1 Sputtering System
      1-2 Evaporation System

  2) CVD (Chemical Vapor Deposition)
      2-1 CVD
      2-2 ALD

- Intelligent Measurement Series
  1) 가스반응 분석챔버
  2) Gas analyzer
  3) Vacuum Probe station
  4) Thermal conductivity
  5) HV measurement
  6) UMP Station

- Lab Series
  1) Photo lithography process
      1-1 Hot plate
      1-2 Spin coator
      1-3 Contact Aligner

  2) Thermal treatment process
      2-1 RTP (Rapid Thermal Process)
      2-2 Vacuum Oven
      2-3 Vacuum Hot plate
      2-4 Muffle furnace

  3) Wet station
  4) DI water generator
  5) Vacuum desiccator

- Etc Series
  1) 3D printer
  2) Solid state of battery test cell
  3) Electro Spinning Station
  4) Auto clave

04. COMMUNITY

01. COMPANY

02. PROCESS

03. SERIES

- Smart Deposition Series
  1) PVD (Physical Vapor Deposition)
      1-1 Sputtering System
      1-2 Evaporation System<

  2) CVD (Chemical Vapor Deposition)
      2-1 CVD
      2-2 ALD

- Intelligent Measurement Series
  1) 가스반응 분석챔버
  2) Gas analyzer
  3) Vacuum Probe station
  4) Thermal conductivity
  5) HV measurement
  6) UMP Station

- Lab Series
  1) Photo lithography process
      1-1 Hot plate
      1-2 Spin coator
      1-3 Contact Aligner

  2) Thermal treatment process
      2-1 RTP (Rapid Thermal Process)
      2-2 Vacuum Oven
      2-3 Vacuum Hot plate
      2-4 Muffle furnace

  3) Wet station
  4) DI water generator
  5) Vacuum desiccator

- Etc Series
  1) 3D printer
  2) Solid state of battery test cell
  3) Electro Spinning Station
  4) Auto clave

04. COMMUNITY