CONFIGURATION |
PERFORMANCE |
---|---|
Max temperature |
Max 1000¡É |
Working temperature |
Max 900¡É |
Uniformity zone |
150§® [< 2%] |
Rapid thermal up speed |
180¡É/min |
Cooling speed |
50¡É/min |
Number of zone |
1Zone |
Number of zone |
Dia.300 x 650 (mm) |
Quartz size |
Dia.80 x 900(mm) |
Heater |
Halogen lamp |
Gas |
MFC control |
Dimension |
950(L) x 550(D) x 1343(H) (mm) |