TERA LEADER / RESEARCH EQUIPMENT
Thermal Reactor
Equipment for thermal treatment and CVD research
Development experience in controlled thermal processing. Current availability and scope require consultation.
Confirm the applicable model, options and final specifications before ordering.
Features
- THERMAL REACTOR
- THERMAL ANNEALING
- CHEMICAL VAPOR DEPOSITION
- RTA
Specifications
| Number of zone | 1, 2 Zone |
|---|---|
| Heater | Kantal/IR LAMP type |
| Heating zone size | 400 (mm) |
| Uniformity zone | 100mm [< 1%] |
| Max temperature | Max 1000℃ |
| Max speed temp. | 20℃/min |
| Sample loading | Manual |
| Control | Manual/PLC |
| Dimension | Varies with specification |
Confirm the final model-specific specification and options before ordering.
Options
- Gas pressure control
- GATE V/V
Downloads
No public downloads are listed for this product. Contact us for applicable documents.